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Title
Japanese:1A2-H05 水熱合成法を用いたPLZT成膜条件の改良とアクチュエータの評価(MEMSとナノテクノロジー) 
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Author
Japanese: 殿界 明真, 山口 大介, 神田岳文, 鈴森 康一.  
English: 殿界 明真, 山口 大介, Takefumi Kanda, Koichi Suzumori.  
Language Japanese 
Journal/Book name
Japanese:ロボティクス・メカトロニクス講演会講演概要集 
English: 
Volume, Number, Page Vol. 2011        pp. 1A2- H05 (1)～(3)
Published date Apr. 2011 
Publisher
Japanese:一般社団法人日本機械学会 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 
Abstract Photo driven actuators have received an attention in recent years. PLZT has a photostrictive effect and can be driven by non-contact energy supply. In this study, PLZT films have been deposited by using a hydrothermal method. The growth and the condition of crystals would depend on a reactive temperature and an amount of reagent. The depositing condition of PLZT films has been improved and the characteristics of the films have been evaluated. Additionally, PLZT film actuators have been fabricated and those actuators have been driven by the ultraviolet lays. By measuring displacement, electric current and generative force, the PLZT thin film actuators have been evaluated.

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