Al/CaF<sub>2</sub>/Si MIS 構造のトンネル電流評価

Publication Information

Title

Japanese:	Al/CaF₂/Si MIS 構造のトンネル電流評価
English:	Tunneling current measurement of Al/CaF₂/Si MIS structures

Author

Japanese:	須田慶太, 傳田純也, 桑田友哉, 越田悠太, 渡辺正裕.
English:	K. Suda, J. Denda, Y. Kuwata, Y. Koshita, M. Watanabe.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

18p-PG2-2 14-069

Published date

Mar. 2014

Publisher

Japanese:
English:

Conference name

Japanese:	第61回応用物理学会春季学術講演会
English:	The 61st The Japan Society of Applied Physics Spring Meeting

Conference site

Japanese:	神奈川
English:	Sagamihara, Kanagawa