集積化CMOS-MEMSへ向けた2軸加速度センサの基礎検討

Publication Information

Title

Japanese:	集積化CMOS-MEMSへ向けた2軸加速度センサの基礎検討
English:

Author

Japanese:	山根大輔, 松島隆明, 小西敏文, 年吉洋, 町田克之, 益一哉.
English:	Daisuke Yamane, Takaaki Matsushima, Toshifumi Konishi, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. MSS-14-002

Published date

May 27, 2014

Publisher

Japanese:
English:

Conference name

Japanese:	平成２６年電気学会センサ・マイクロマシン部門総合研究会
English:

Conference site

Japanese:	東京都
English:

Official URL