A Tri-Axis MEMS Capacitive Sensor Using Multi-Layered High-density Metal for an Integrated CMOS-MEMS Accelerometer

Publication Information

Title

Japanese:
English:	A Tri-Axis MEMS Capacitive Sensor Using Multi-Layered High-density Metal for an Integrated CMOS-MEMS Accelerometer

Author

Japanese:	山根大輔, 小西敏文, 松島隆明, 年吉洋, 町田克之, 益一哉.
English:	Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. 113-116

Published date

May 20, 2014

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2014 IEEE International Interconnect Technology Conference/Advanced Metallization Conference (IITC/AMC 2014)

Conference site

Japanese:
English:	San Jose, CA

Official URL