Integrated CMOS-MEMS Technology and its Application

Publication Information

Title

Japanese:
English:	Integrated CMOS-MEMS Technology and its Application

Author

Japanese:	町田克之, 小西敏文, 山根大輔, 年吉洋, 益一哉.
English:	Katsuyuki Machida, Toshifumi Konishi, Daisuke Yamane, Hiroshi Toshiyoshi, Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

May 11, 2014

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The 2nd Int. Symp. on More-than-Moore, the 225th Meeting of the Electrochemical Society

Conference site

Japanese:
English:	Orland, Florida

Official URL