Electrical Properties of (110)-Oriented Nondoped Mg2Si Films with p-Type Conduction Prepared by RF Magnetron Sputtering Method

Publication Information

Title

Japanese:
English:	Electrical Properties of (110)-Oriented Nondoped Mg2Si Films with p-Type Conduction Prepared by RF Magnetron Sputtering Method

Author

Japanese:	小川正太, 片桐淳生, 清水荘雄, 松島正明, 秋山賢輔, Yoshisato Kimura, 内田寛, 舟窪浩.
English:	Shota Ogawa, Atsuo Katagiri, Takao Shimizu, Masaaki Matsushima, Kensuke Akiyama, Yoshisato Kimura, Hiroshi Uchida, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	J. Electronic Mater.

Volume, Number, Page

Vol. 43 No. 6 pp. 2269-2273

Published date

2014

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI