High Temperature Reproducible Preparation of Mg2Si Films on (001)Al2O3 substrates Using RF Magnetron Sputtering Method

Publication Information

Title

Japanese:
English:	High Temperature Reproducible Preparation of Mg2Si Films on (001)Al2O3 substrates Using RF Magnetron Sputtering Method

Author

Japanese:	片桐淳生, 小川正太, 清水荘雄, 松島正明, 秋山賢輔, 舟窪浩.
English:	Atsuo Katagiri, Shota Ogawa, Takao Shimizu, Masaaki Matsushima, Kensuke Akiyama, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	Mater. Res. Soc. Symp. Proc

Volume, Number, Page

Vol. 1642

Published date

2014

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: