A Sub-1G Capacitive Sensor for Integrated CMOS-MEMS Accelerometers

Publication Information

Title

Japanese:
English:	A Sub-1G Capacitive Sensor for Integrated CMOS-MEMS Accelerometers

Author

Japanese:	Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu.
English:	Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. P2-55

Published date

June 29, 2014

Publisher

Japanese:
English:

Conference name

Japanese:
English:	7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT2014)

Conference site

Japanese:
English:	Daegu

Official URL