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Title
Japanese: 
English:Silicon-based Waveguide Optical Isolator by Direct Bonding Technology 
Author
Japanese: 庄司雄哉, 水本哲弥.  
English: Yuya Shoji, Tetsuya MIZUMOTO.  
Language English 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page         p. 319
Published date June 23, 2014 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English:Collaborative Conference on Materials Research (CCMR 2014) 
Conference site
Japanese:ソウル 
English:Seoul 
Abstract We have investigated waveguide-type magneto-optical isolators based on silicon photonic waveguides with an upper cladding layer of magneto-optic garnet. It is difficult to integrate a single-crystalline garnet having a large magneto-optical effect on silicon or any other waveguide platforms. Our approach is to use a direct bonding technology which realizes direct contact between two different materials without any adhesive [1]. Any interlayer between core and upper cladding reduces the nonreciprocal effect. Therefore, our approach enables more efficient nonreciprocal effect than any other approach using adhesive bonding [2] or deposition with buffer layer [3]. Our direct bonding is carried out with plasma activation followed by pressing and annealing processes in a vacuum chamber.

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