Deposition of segment-structured DLC films by FCVA method

Publication Information

Title

Japanese:
English:	Deposition of segment-structured DLC films by FCVA method

Author

Japanese:	近藤翔太, 齋藤啓, 松尾誠, 岩本喜直, 赤坂大樹, 大竹尚登.
English:	Shota Kondou, Kei Saito, Makoto Matsuo, Yoshinao Iwamoto, Hiroki Akasaka, Naoto Ohtake.

Language

English

Journal/Book name

Japanese:
English:	The15th Inteenational Conference on Precision Engineering(ICPE2014)

Volume, Number, Page

pp. 292-293

Published date

July 22, 2014

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The15th Inteenational Conference on Precision Engineering(ICPE2014)

Conference site

Japanese:
English:	kanazawa,Ishikawa