Study on the effect of heat treatment conditions on metalorganic-chemical-vapor-deposited ferroelectric Hf0.5Zr0.5O2 thin film on Ir electrode

Publication Information

Title

Japanese:
English:	Study on the effect of heat treatment conditions on metalorganic-chemical-vapor-deposited ferroelectric Hf0.5Zr0.5O2 thin film on Ir electrode

Author

Japanese:	清水荘雄, 横内達彦, 白石貴久, 及川貴弘, P. S. Sankara Rama Krishnan, 舟窪浩.
English:	Takao Shimizu, Tatsuhiko Yokouchi, Takahisa Shiraish, Takahiro Oikawa, P. S. Sankara Rama Krishnan, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	Jpn. J. Appl. Phys.

Volume, Number, Page

Vol. 53 pp. 09PA04-1-6

Published date

2014

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: