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Publication Information
Title
Japanese:
English:
A Sub-1G Tri-axis MEMS Capacitive Sensor for Integrated CMOS-MEMS Accelerometers
Author
Japanese:
山根 大輔
,
小西 敏文
,
松島 隆明
,
年吉 洋
,
益 一哉
,
町田 克之
.
English:
Daisuke Yamane
,
Toshifumi Konishi
,
Takaaki Matsushima
,
Hiroshi Toshiyoshi
,
Kazuya Masu
,
Katsuyuki Machida
.
Language
English
Journal/Book name
Japanese:
English:
Volume, Number, Page
p. 974-975
Published date
Sept. 8, 2014
Publisher
Japanese:
English:
Conference name
Japanese:
English:
International Conference on Solid State Devices and Materials
Conference site
Japanese:
筑波
English:
Tsukuba
Official URL
http://www.ssdm.jp/
©2007
Tokyo Institute of Technology All rights reserved.