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Publication Information
Title
Japanese:
集積化CMOS?MEMS加速度センサへ向けたsub-1G静電容量型センサの検討
English:
Author
Japanese:
亀井将太
,
山根大輔
,
小西敏文
,
松島隆明
,
年吉 洋
,
町田克之
,
益 一哉
.
English:
Shota Kamei
,
Daisuke Yamane
,
Toshifumi Konishi
,
Takaaki Matsushima
,
Hiroshi Toshiyoshi
,
Katsuyuki Machida
,
Kazuya Masu
.
Language
Japanese
Journal/Book name
Japanese:
English:
Volume, Number, Page
pp. 13-065
Published date
Sept. 17, 2014
Publisher
Japanese:
English:
Conference name
Japanese:
第75回応用物理学会秋季学術講演会
English:
Conference site
Japanese:
北海道札幌市
English:
Official URL
http://meeting.jsap.or.jp/index.html
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Tokyo Institute of Technology All rights reserved.