Heteroepitaxial growth of diamond films on 3C-SiC (001)/Si substrates by antenna-edge microwave plasma CVD

Publication Information

Title

Japanese:
English:	Heteroepitaxial growth of diamond films on 3C-SiC (001)/Si substrates by antenna-edge microwave plasma CVD

Author

Japanese:	矢板潤也, 岩崎孝之, M.Natal, S.E.Sadow, 波多野睦子.
English:	J.Yaita, T.Iwasaki, M.Natal, S.E.Sadow, M.Hatano.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 9, 2014

Publisher

Japanese:
English:

Conference name

Japanese:
English:	SSDM 2014

Conference site

Japanese:
English:	Tsukuba