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Title
Japanese:SF6ドライエッチングによるシリコン量子ドットの作製と評価 
English: 
Author
Japanese: 呂逸, 小寺哲夫, 堀部浩介, 小田俊理.  
English: Yi Ro, Tetsuo Kodera, kousuke Horibe, SHUNRI ODA.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date 2014 
Publisher
Japanese: 
English: 
Conference name
Japanese:第61回応用物理学会春季学術講演会 
English: 
Conference site
Japanese:相模原市 
English: 

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