Ａｕ積層形成技術による３軸ＭＥＭＳ加速度センサの検討

Publication Information

Title

Japanese:	Ａｕ積層形成技術による３軸ＭＥＭＳ加速度センサの検討
English:

Author

Japanese:	松島隆明, 山根大輔, 小西敏文, 年吉洋, 益一哉, 町田克之.
English:	Takaaki Matsushima, Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Oct. 20, 2014

Publisher

Japanese:
English:

Conference name

Japanese:	第６回集積化ＭＥＭＳシンポジウム
English:

Conference site

Japanese:	島根県松江市
English:

Official URL