Investigation of the effect of oxygen gas on properties of GAZO thin films fabricated by facing targets sputtering system

Publication Information

Title

Japanese:
English:	Investigation of the effect of oxygen gas on properties of GAZO thin films fabricated by facing targets sputtering system

Author

Japanese:	Hong JeongSoo, 松下伸広, K.H. Kim.
English:	J.S. Hong, N. Matsushita, K.H. Kim.

Language

English

Journal/Book name

Japanese:
English:	Semiconductor Science and Technology

Volume, Number, Page

Vol. 29 No. 7

Published date

Apr. 2014

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI