[Invited] Multi Patterning Techniques for Manufacturability Enhancement in Optical Lithography

Publication Information

Title

Japanese:
English:	[Invited] Multi Patterning Techniques for Manufacturability Enhancement in Optical Lithography

Author

Japanese:	高橋篤司, AWAD Ahmed, 小平行秀, 松井知己, Chikaaki Kodama, Shigeki Nojima, Satoshi Tanaka.
English:	Atsushi Takahashi, Ahmed Awad, Yukihide Kohira, Tomomi Matsui, Chikaaki Kodama, Shigeki Nojima, Satoshi Tanaka.

Language

English

Journal/Book name

Japanese:
English:	Proc. the 2014 International Conference on Integrated Circuits, Design, and Verification (ICDV 2014)

Volume, Number, Page

pp. 117-122

Published date

Nov. 15, 2014

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:	Hanoi