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Publication Information
Title
Japanese:
先端放電型プラズマCVDを用いた3C-SiC/Si上へのダイヤモンドヘテロエピタキシャル成長
English:
Author
Japanese:
矢板潤也
,
岩崎孝之
, M.Natal, S.E. Saddow,
波多野睦子
.
English:
Junya Yaita
,
Takayuki Iwasaki
, M.Natal, S.E. Saddow,
Mutsuko Hatano
.
Language
Japanese
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Nov. 19, 2014
Publisher
Japanese:
English:
Conference name
Japanese:
第28回ダイヤモンドシンポジウム
English:
Conference site
Japanese:
千住
English:
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Tokyo Institute of Technology All rights reserved.