先端放電型プラズマＣＶＤを用いた3C-SiC(001)/Si(001)ウェハ上への高配向ダイヤモンド薄膜合成

Publication Information

Title

Japanese:	先端放電型プラズマＣＶＤを用いた3C-SiC(001)/Si(001)ウェハ上への高配向ダイヤモンド薄膜合成
English:

Author

Japanese:	矢板潤也, 岩崎孝之, Meralys Natal, Steven E. Saddow, 波多野睦子.
English:	Junya Yaita, Takayuki Iwasaki, Meralys Natal, Steven E. Saddow, Mutsuko Hatano.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 17, 2014

Publisher

Japanese:
English:

Conference name

Japanese:	第75回ダ応用物理学会秋季学術講演会,
English:

Conference site

Japanese:	北海道
English: