Design of process diagnostics for excimer laser irradiation of oxide thin films

Publication Information

Title

Japanese:
English:	Design of process diagnostics for excimer laser irradiation of oxide thin films

Author

Japanese:	K. Shinoda, T.Nakajima, 波多野睦子, T. Tsuchiya.
English:	K. Shinoda, T.Nakajima, M. Hatano, T. Tsuchiya.

Language

English

Journal/Book name

Japanese:
English:	Japanese Journal of Applied Physics

Volume, Number, Page

Vol. 53 pp. 05FB08-1～05FB08-6

Published date

Apr. 7, 2014

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI