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Publication Information
Title
Japanese:
English:
Stability of Movable Structure Formed by Au Electroplating for MEMS Devices
Author
Japanese:
寺西 美波
,
TSO-FU MARK CHANG
,
小西 敏文
, 町田 克之,
山根 大輔
,
伊藤 浩之
,
益 一哉
,
里 達雄
,
曽根 正人
,
曽根 正人
.
English:
Minami Teranishi
,
Tso-Fu Mark Chang
,
Toshifumi Konishi
, Masaki Yano,
Katsuyuki Machida
,
Daisuke Yamane
,
Hiroyuki Ito
,
Kazuya Masu
,
Tatsuo Sato
,
Masato Sone
.
Language
English
Journal/Book name
Japanese:
English:
ICMAT2015 & IUMRS-ICA2015,
Volume, Number, Page
Published date
June 28, 2015
Publisher
Japanese:
English:
Conference name
Japanese:
English:
ICMAT2015 & IUMRS-ICA2015,
Conference site
Japanese:
English:
Singapore
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Tokyo Institute of Technology All rights reserved.