MEMS for sensing sub-1G | Science Tokyo Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	MEMS for sensing sub-1G

Author

Japanese:	山根大輔, 町田克之, 益一哉.
English:	Daisuke Yamane, Katsuyuki Machida, Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. 19

Published date

Nov. 21, 2014

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The First Joint Workshop on Electrical Engineering between Tokyo Tech &

Conference site

Japanese:
English:	Daejeon

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