磁束密度を用いた超磁歪素子駆動微動機構の位置決め

Publication Information

Title

Japanese:	磁束密度を用いた超磁歪素子駆動微動機構の位置決め
English:	Nano-positioning control using magnetic flux density for giant magnetostrictive actuator

Author

Japanese:	田村勇樹, 澤野宏, 吉岡勇人, 新野秀憲.
English:	Yuuki Tamura, hiroshi sawano, Hayato Yoshioka, HIDENORI SHINNO.

Language

Japanese

Journal/Book name

Japanese:	2015年度精密工学会春季大会学術講演会講演論文集
English:

Volume, Number, Page

pp. 565-566

Published date

Mar. 17, 2015

Publisher

Japanese:
English:

Conference name

Japanese:	2015年度精密工学会春季大会学術講演会
English:

Conference site

Japanese:	東京
English: