Fast Mask Assignment using Positive Semidefinite Relaxation in LELECUT Triple Patterning Lithography

Publication Information

Title

Japanese:
English:	Fast Mask Assignment using Positive Semidefinite Relaxation in LELECUT Triple Patterning Lithography

Author

Japanese:	小平行秀, 松井知己, Yoko Yokoyama, Chikaaki Kodama, 高橋篤司, Shigeki Nojima, Satoshi Tanaka.
English:	Yukihide Kohira, Tomomi Matsui, Yoko Yokoyama, Chikaaki Kodama, Atsushi Takahashi, Shigeki Nojima, Satoshi Tanaka.

Language

English

Journal/Book name

Japanese:
English:	Proc. Asia and South Pacific Design Automation Conference 2015 (ASP-DAC 2015)

Volume, Number, Page

pp. 665-670

Published date

Jan. 22, 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI