高感度静電容量型センサにおけるBrownian Noise評価手法

Publication Information

Title

Japanese:	高感度静電容量型センサにおけるBrownian Noise評価手法
English:	An Evaluation Method of Brownian Noise in Highly Sensitive Capacitive Sensors

Author

Japanese:	山根大輔, 小西敏文, 松島隆明, 亀井将太, 益一哉, 町田克之.
English:	Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Shota Kamei, Kazuya Masu, Katsuyuki Machida.

Language

Japanese

Journal/Book name

Japanese:	電気学会論文誌E（センサ・マイクロマシン部門誌）
English:

Volume, Number, Page

vol. 135 no. 4 pp. 142-143

Published date

Apr. 1, 2015

Publisher

Japanese:	一般社団法人電気学会
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI