Hydrothermal Deposition of the PZT film and Applications of Piezoelectric Actuators

Publication Information

Title

Japanese:
English:	Hydrothermal Deposition of the PZT film and Applications of Piezoelectric Actuators

Author

Japanese:	Daichi Nakahira, 神田岳文, 鈴森康一.
English:	Daichi Nakahira, Takefumi Kanda, Koichi Suzumori.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. 522-527

Published date

Nov. 2012

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Mechatronics and Machine Vision in Practice (M2VIP2012)

Conference site

Japanese:
English: