Insertion effect of the 3-nm-thick Co(Pt) layer on AlN preferred orientation and residual stress in the c-axis textured AlN film

Publication Information

Title

Japanese:
English:	Insertion effect of the 3-nm-thick Co(Pt) layer on AlN preferred orientation and residual stress in the c-axis textured AlN film

Author

Japanese:	春本高志, 村石信二, 史蹟, 中村吉男, Takashi Ishiguro.
English:	Takashi Harumoto, Shinji Muraishi, Ji Shi, Yoshio Nakamura, Takashi Ishiguro.

Language

English

Journal/Book name

Japanese:
English:	MRS Proceedings

Volume, Number, Page

Vol. 1515

Published date

Mar. 19, 2013

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI