連続成膜により作製した金属/AlNナノ多層薄膜の回折結晶学的研究

Publication Information

Title

Japanese:	連続成膜により作製した金属/AlNナノ多層薄膜の回折結晶学的研究
English:	Diffraction Studies of Metal/AlN Nano-multilayer Films Fabricated using Continuous Deposition

Author

Japanese:	春本高志.
English:	Takashi HARUMOTO.

Type

Type:	Thesis (Ph.D.)
Country:	Japan

Language

Japanese

Organization name

Tokyo Institute of Technology

Report number

甲第8656号

Conferred date

2012/03/26

Judge

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