CMOS -MEMS -New Frontier of Multilevel Interconnect Technology-

Publication Information

Title

Japanese:
English:	CMOS -MEMS -New Frontier of Multilevel Interconnect Technology-

Author

Japanese:	町田克之, 小西敏文, 山根大輔, 年吉洋, 益一哉.
English:	Katsuyuki Machida, Toshifumi Konishi, Daisuke Yamane, Hiroshi Toshiyoshi, Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. 201

Published date

Apr. 14, 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2015 International Conference on Electronics Packaging and iMAPS All Asia Conference (ICEP-IAAC 2015)

Conference site

Japanese:
English:	Kyoto

Official URL