Japanese
Home
Search
Horizontal Search
Publication Search
( Advanced Search )
Patent Search
( Advanced Search )
Research Highlight Search
( Advanced Search )
Researcher Search
Search by Organization
Support
FAQ
T2R2 User Registration
Doctoral thesis registration
Support/Contact
About T2R2
What's T2R2?
Operation Guidance
Leaflets
About file disclosure
Related Links
Tokyo Tech
STAR Search
NII IR Program
Home
>
Help
Publication Information
Title
Japanese:
English:
CMOS -MEMS -New Frontier of Multilevel Interconnect Technology-
Author
Japanese:
町田 克之
,
小西 敏文
,
山根 大輔
,
年吉 洋
,
益 一哉
.
English:
Katsuyuki Machida
,
Toshifumi Konishi
,
Daisuke Yamane
,
Hiroshi Toshiyoshi
,
Kazuya Masu
.
Language
English
Journal/Book name
Japanese:
English:
Volume, Number, Page
pp. 201
Published date
Apr. 14, 2015
Publisher
Japanese:
English:
Conference name
Japanese:
English:
2015 International Conference on Electronics Packaging and iMAPS All Asia Conference (ICEP-IAAC 2015)
Conference site
Japanese:
English:
Kyoto
Official URL
http://www.jiep.or.jp/icep/
©2007
Tokyo Institute of Technology All rights reserved.