A Dual-Axis MEMS Capacitive Inertial Sensor with High-Density Proof Mass

Publication Information

Title

Japanese:
English:	A Dual-Axis MEMS Capacitive Inertial Sensor with High-Density Proof Mass

Author

Japanese:	山根大輔, 松島隆明, 小西敏文, 年吉洋, 益一哉, 町田克之.
English:	Daisuke Yamane, Takaaki Matsushima, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida.

Language

English

Journal/Book name

Japanese:
English:	Microsystem Technologies

Volume, Number, Page

Vol. 22 pp. 459-464

Published date

Apr. 26, 2015

Publisher

Japanese:
English:	Springer Berlin Heidelberg

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI