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Title
Japanese:イヤ放電加工面への水熱合成法によるPZT薄膜の成膜 
English: 
Author
Japanese: 上野雅裕, 神田 岳文, 鈴森 康一, 道廣善彦, 妹尾典久.  
English: 上野雅裕, Takefumi Kanda, Koichi Suzumori, 道廣善彦, 妹尾典久.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Sept. 2010 
Publisher
Japanese: 
English: 
Conference name
Japanese:2010年度精密工学会秋季大会学術講演会 
English: 
Conference site
Japanese: 
English: 

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