A CYLINDRICAL MICRO ULTRASONIC MOTOR USING MICRO-MACHINED PIEZOELECTRIC VIBRATOR

Publication Information

Title

Japanese:
English:	A CYLINDRICAL MICRO ULTRASONIC MOTOR USING MICRO-MACHINED PIEZOELECTRIC VIBRATOR

Author

Japanese:	神田岳文, Akira Makino, Yoshitaka Oomori, 鈴森康一.
English:	Takefumi Kanda, Akira Makino, Yoshitaka Oomori, Koichi Suzumori.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Vol. 1 pp. 721-724

Published date

June 2005

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The 13th International Conference on Solid-state Sensors， Actuators， and Microsystems (Transducers 2005)

Conference site

Japanese:
English: