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Title
Japanese:マイクロアクチュエータ 
English: 
Author
Japanese: 鈴森 康一, 川原 伸章.  
English: Koichi Suzumori, 川原 伸章.  
Language Japanese 
Journal/Book name
Japanese:電気学会論文誌E(センサ・マイクロマシン準部門誌) 
English: 
Volume, Number, Page Vol. 122-E    No. 12    pp. 555-559
Published date Dec. 2002 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 

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