A Cylindrical Micro-Ultrasonic Motor Using Micromachined Bulk Piezoelectric Vibrator with Glass Case

Publication Information

Title

Japanese:
English:	A Cylindrical Micro-Ultrasonic Motor Using Micromachined Bulk Piezoelectric Vibrator with Glass Case

Author

Japanese:	神田岳文, Akira Makino, Yoshitaka Oomori, 鈴森康一.
English:	Takefumi Kanda, Akira Makino, Yoshitaka Oomori, Koichi Suzumori.

Language

English

Journal/Book name

Japanese:
English:	Japanese Journal of Applied Physics

Volume, Number, Page

Vol. 45 No. 5B pp. 4764-4769

Published date

May 2006

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: