A micro ultrasonic motor using a micro-machined cylindrical bulk PZT transducer

Publication Information

Title

Japanese:
English:	A micro ultrasonic motor using a micro-machined cylindrical bulk PZT transducer

Author

Japanese:	神田岳文, Akira Makino, Tomohisa Ono, 鈴森康一, Takeshi Morita, Minoru Kuribayashi Kurosawa.
English:	Takefumi Kanda, Akira Makino, Tomohisa Ono, Koichi Suzumori, Takeshi Morita, Minoru Kuribayashi Kurosawa.

Language

English

Journal/Book name

Japanese:
English:	Sensors and Actuators A

Volume, Number, Page

Vol. 127 pp. 131-138

Published date

Feb. 2006

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI