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Publication Information
Title
Japanese:
English:
A Sub-1G MEMS Sensor
Author
Japanese:
山根 大輔
,
小西 敏文
,
年吉 洋
,
益 一哉
,
町田 克之
.
English:
Daisuke Yamane
,
Toshifumi Konishi
,
Hiroshi Toshiyoshi
,
Kazuya Masu
,
Katsuyuki Machida
.
Language
English
Journal/Book name
Japanese:
English:
Volume, Number, Page
pp. 1332
Published date
May 24, 2015
Publisher
Japanese:
English:
Conference name
Japanese:
English:
the 227th ECS Meeting
Conference site
Japanese:
English:
Chicago, Illinois
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Tokyo Institute of Technology All rights reserved.