A Sub-1G MEMS Sensor

Publication Information

Title

Japanese:
English:	A Sub-1G MEMS Sensor

Author

Japanese:	山根大輔, 小西敏文, 年吉洋, 益一哉, 町田克之.
English:	Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. 1332

Published date

May 24, 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:	the 227th ECS Meeting

Conference site

Japanese:
English:	Chicago, Illinois