A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology

Publication Information

Title

Japanese:
English:	A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology

Author

Japanese:	山根大輔, 小西敏文, 寺西美波, TSO-FU MARK CHANG, 陳君怡, 益一哉, 曽根正人, 町田克之, 町田克之.
English:	Daisuke Yamane, Toshifumi Konishi, Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Hiroshi Toshiyoshi, Kazuya Masu, Masato Sone, Katsuyuki Machida.

Language

English

Journal/Book name

Japanese:
English:	AMC2015

Volume, Number, Page

Published date

Sept. 9, 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:	AMC2015, Advanced Metallization Conference

Conference site

Japanese:
English:	Austin, TX