Heteroepitaxial Growth of Diamond Films on 3C-SiC / Si Substrates with Utilization of Antenna-Edge Microwave Plasma CVD for Nucleation

Publication Information

Title

Japanese:
English:	Heteroepitaxial Growth of Diamond Films on 3C-SiC / Si Substrates with Utilization of Antenna-Edge Microwave Plasma CVD for Nucleation

Author

Japanese:	矢板潤也, 岩崎孝之, M. Natal, S. E. Saddow, 波多野睦子.
English:	J. Yaita, T. Iwasaki, M. Natal, S. E. Saddow, M. Hatano.

Language

English

Journal/Book name

Japanese:
English:	2015 Jananese Journal of Applied Physics

Volume, Number, Page

Vol. 54 pp. 04DH13-1〜4

Published date

Mar. 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI