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Title
Japanese:電解金めっきで作製した微小カンチレバーの形状安定性評価 
English: 
Author
Japanese: 寺西美波, Chang Tso-Fu Mark, 山根大輔, 小西敏文, 松島隆明, 伊藤浩之, 年吉 洋, 町田克之, 益 一哉, 曽根正人.  
English: Minami Teranishi, Mark Chang, Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroyuki Ito, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu, Masato Sone.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page         pp. 15-18
Published date July 2, 2015 
Publisher
Japanese: 
English: 
Conference name
Japanese:平成27年電気学会センサ・マイクロマシン部門総合研究会 
English: 
Conference site
Japanese:福岡市 
English: 
Official URL http://www.iee.jp/?post_type=custom_event&p=10810
 

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