Mechanical Properties of Cu-Ni-Si alloy Evaluated by Micro-Tensile Test for Application in MEMS

Publication Information

Title

Japanese:
English:	Mechanical Properties of Cu-Ni-Si alloy Evaluated by Micro-Tensile Test for Application in MEMS

Author

Japanese:	柳田佐理, 荒木章好, TSO-FU MARK CHANG, 陳君怡, 名越貴志, 小林郁夫, 細田秀樹, 里達雄, 曽根正人.
English:	Sari Yanagida, Akiyoshi Araki, Tso-Fu Mark Chang, Chun-Yi Chen, Nagoshi Takashi, Equo Kobayashi, Hideki Hosoda, Tatsuo Sato, Masato Sone.

Language

English

Journal/Book name

Japanese:
English:	SSDM2015, 2015 International Conference on Solid State Devises and Materials

Volume, Number, Page

Published date

Sept. 27, 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:	SSDM2015, 2015 International Conference on Solid State Devises and Materials

Conference site

Japanese:
English:	Sapporo