Study on Ti/Au Two-Layered Cantilevers with different Aspect Ratio for MEMS Devices

Publication Information

Title

Japanese:
English:	Study on Ti/Au Two-Layered Cantilevers with different Aspect Ratio for MEMS Devices

Author

Japanese:	寺西美波, TSO-FU MARK CHANG, 陳君怡, 小西敏文, 町田克之, 年吉洋, 山根大輔, 益一哉, 曽根正人.
English:	Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone.

Language

English

Journal/Book name

Japanese:
English:	SSDM2015, 2015 International Conference on Solid State Devises and Materials

Volume, Number, Page

pp. 52-53

Published date

Sept. 27, 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:	SSDM2015, 2015 International Conference on Solid State Devises and Materials

Conference site

Japanese:
English:	Sapporo