Origin of Lower Film Density and Larger Defect Density in Amorphous In-Ga-Zn-O Deposited at High Total Pressure

Publication Information

Title

Japanese:
English:	Origin of Lower Film Density and Larger Defect Density in Amorphous In-Ga-Zn-O Deposited at High Total Pressure

Author

Japanese:	Jakub Grochowski, 羽生有一郎, 安部勝美, Jakub Kaczmarski, Jan Dyczewski, 平松秀典, 雲見日出也, 細野秀雄, 神谷利夫.
English:	Jakub Grochowski, Yuichiro Hanyu, Katsumi Abe, Jakub Kaczmarski, Jan Dyczewski, Hidenori Hiramatsu, Hideya Kumomi, Hideo Hosono, Toshio Kamiya.

Language

English

Journal/Book name

Japanese:
English:	J. Disp. Technol.

Volume, Number, Page

Vol. 11 pp. 523-527

Published date

2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI