Heteroepitaxial Growth of Diamond on Si Substrates via 3C-SiC buffer layer by Antenna Edge Microwave Plasma CVD for Power Electronics Application

Publication Information

Title

Japanese:
English:	Heteroepitaxial Growth of Diamond on Si Substrates via 3C-SiC buffer layer by Antenna Edge Microwave Plasma CVD for Power Electronics Application

Author

Japanese:	矢板潤也, 岩崎孝之, M. Natal, S. E. Saddow, 波多野睦子.
English:	J. Yaita, T. Iwasaki, M. Natal, S. E. Saddow, M. Hatano.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Dec. 2014

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The Third International Education Forum on Environment and Energy Science

Conference site

Japanese:
English:	Perth