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Publication Information
Title
Japanese:
電解金めっきで作製したMEMSデバイスにおける動作構造安定性
English:
Author
Japanese:
寺西美波
,
Tso-Fu Mark Chang
,
小西敏文
,
松島隆明
,
町田克之
,
年吉 洋
,
山根大輔
,
伊藤浩之
,
益 一哉
,
曽根正人
.
English:
Minami Teranishi
,
Tso-Fu Mark Chang
,
Toshifumi Konishi
,
Takaaki Matsushima
,
Katsuyuki Machida
,
Hiroshi Toshiyoshi
,
Daisuke Yamane
,
Hiroyuki Ito
,
Kazuya Masu
,
Masato Sone
.
Language
Japanese
Journal/Book name
Japanese:
English:
Volume, Number, Page
p. 7
Published date
July 31, 2015
Publisher
Japanese:
English:
Conference name
Japanese:
応用物理学会集積化MEMS技術研究会 第6回集積化MEMS技術研究ワークショップ
English:
Conference site
Japanese:
東京都世田谷区
English:
©2007
Tokyo Institute of Technology All rights reserved.