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Title
Japanese:電解金めっきで作製したMEMSデバイスにおける動作構造安定性 
English: 
Author
Japanese: 寺西美波, Tso-Fu Mark Chang, 小西敏文, 松島隆明, 町田克之, 年吉 洋, 山根大輔, 伊藤浩之, 益 一哉, 曽根正人.  
English: Minami Teranishi, Tso-Fu Mark Chang, Toshifumi Konishi, Takaaki Matsushima, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Hiroyuki Ito, Kazuya Masu, Masato Sone.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page         p. 7
Published date July 31, 2015 
Publisher
Japanese: 
English: 
Conference name
Japanese:応用物理学会集積化MEMS技術研究会 第6回集積化MEMS技術研究ワークショップ 
English: 
Conference site
Japanese:東京都世田谷区 
English: 

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