A Low Mechanical Noise Tri-axis MEMS Ineretial Sensor Fabricated by Multi-layered Metal Technology

Publication Information

Title

Japanese:
English:	A Low Mechanical Noise Tri-axis MEMS Ineretial Sensor Fabricated by Multi-layered Metal Technology

Author

Japanese:	山根大輔, 小西敏文, 年吉洋, 益一哉, 町田克之.
English:	Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. Wed-C-p11

Published date

Sept. 21, 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:	41st Micro and Nano Engineering (MNE2015)

Conference site

Japanese:
English:	Hague