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Publication Information
Title
Japanese:
English:
Robustness of Integrated Stoppers for MEMS Accelerometer Fabricated by Multi-layered Metal Technology
Author
Japanese:
山根 大輔
,
小西 敏文
,
高安 基大
,
佐布 晃昭
,
年吉洋
,
曽根 正人
,
益 一哉
,
町田 克之
.
English:
Daisuke Yamane
,
Toshifumi Konishi
,
Motohiro Takayasu
,
Teruaki Safu
,
Hiroshi Toshiyoshi
,
Masato Sone
,
Kazuya Masu
,
Katsuyuki Machida
.
Language
English
Journal/Book name
Japanese:
English:
SSDM2015, 2015 International Conference on Solod State Devices and Materials
Volume, Number, Page
pp. 786-787
Published date
Sept. 27, 2015
Publisher
Japanese:
English:
Conference name
Japanese:
English:
SSDM2015, 2015 International Conference on Solod State Devices and Materials
Conference site
Japanese:
English:
Hokkaido
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Tokyo Institute of Technology All rights reserved.