Extreme ultraviolet light sources and soft x-ray laser based on discharge produced plasma

Publication Information

Title

Japanese:
English:	Extreme ultraviolet light sources and soft x-ray laser based on discharge produced plasma

Author

Japanese:	堀田栄喜, 酒井雄祐, 林靖, 新美剛太, Huang Bin, ｽﾞｷｭｼ, 宋仁皓, 渡邊正人.
English:	E. Hotta, Y. Sakai, Y. Hayashi, G. Niimi, B. Huang, Q. Zhu, I. Song, M. Watanabe.

Language

English

Journal/Book name

Japanese:
English:	Proc. of SPIE

Volume, Number, Page

Vol. 9524 pp. 9524U1 - 8

Published date

Aug. 2015

Publisher

Japanese:
English:	SPIE

Conference name

Japanese:
English:	Int. Conf. on Optical and Photonic Engineering (icOPEN2015)

Conference site

Japanese:	Singapore
English:

File

DOI