非点収差オフセットを持つスポット像からの収差逆解析

Publication Information

Title

Japanese:	非点収差オフセットを持つスポット像からの収差逆解析
English:	Aberration Retrieval Method using spot images with astigmatism offset

Author

Japanese:	大友暢寛, 大西有希.
English:	Nobuhiro OTOMO, Kenji AMAYA.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Oct. 12, 2015

Publisher

Japanese:
English:

Conference name

Japanese:	第28回計算力学講演会
English:	The 28th Computational Mechanics division Conference (CMD2015)

Conference site

Japanese:	横浜市
English:	Yokohama