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Title
Japanese: 
English:Discussion on Electron Temperature of Low-Pressure Discharge Oxygen Plasma with Non-Maxwellian EEDF Based on Statistical Physics 
Author
Japanese: 赤塚 洋, 田中 昌徳.  
English: HIROSHI AKATSUKA, YOSHINORI TANAKA.  
Language English 
Journal/Book name
Japanese: 
English:Bulletin of the American Physical Society 
Volume, Number, Page Vol. 60    No. 9    pp. 148-149
Published date Oct. 12, 2015 
Publisher
Japanese: 
English:The American Physical Society 
Conference name
Japanese: 
English:68th Annual Gaseous Electronics Conference/9th International Conference on Reactive Plasmas/33rd Symposium on Plasma Processing 
Conference site
Japanese:ホノルル 
English:Honolulu 
Official URL http://meetings.aps.org/Meeting/GEC15/Session/UF3.1
 
Abstract We reconsider electron temperature of non-equilibrium oxygen plasmas based on thermodynamics and statistical physics by the relationship between entropy and mean energy of electron gas. First, we solve the Boltzmann equation to obtain electron energy distribution function (EEDF) F(ϵ) of the oxygen plasma for a given reduced electric field E/N. We also simultaneously solve kinetic equations to determine some essential excited species in the oxygen plasma, since the EEDF should be self-consistently solved with the densities of collision partners. Next, we calculate the electron mean electron energy U=⟨ϵ⟩=∫∞0ϵF(ϵ)dϵ and entropy S=−k∫∞0F(ϵ)ln[F(ϵ)]dϵ for each value of the reduced electric field E/N. Then, we can obtain the electron temperature calculated as Tthe=[∂S/∂U]−1. After that, we discuss the difference between Tthe and the kinetic temperature Tke≡(2/3)⟨ϵ⟩, as well as the temperature given as a slope of the calculated EEDF for each value of E/N from the viewpoint of statistical physics as well as elementary processes.

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